Optical metrology is one of the key technologies in today's manufacturing industry. In this
article, we provide an insight into optical measurement technologies for precision …

As the primary error source in white-light interferometry (WLI), the error of scanning steps
directly affects coherence peak sensing and greatly lowers the measurement accuracy …

In order to perform an exact surface profile measurement with a white-light scanning
interferometer (WLSI), an actual optical path difference (OPD) changing with time is detected …

White light interferometry (WLI) is a fast nanoscale surface measurement method suitable for
measuring the quality of machined surfaces. In this study, a miniaturized WLI integrated into …

We present a Mirau-type coherence scanning interferometer (CSI) with an oscillating
reference mirror and an integrated interferometric distance sensor (IDS) sharing the optical …

Optische 3D-Präzisionsmessverfahren, wie Weißlichtinterferometrie oder konfokale
Mikroskopie, die eine Höhenauflösung bis in den Subnanometerbereich sowie sehr kurze …

As a type of interference microscopy, white light interferometry (WLI) is well-established
measuring technique in advanced manufacturing industry and scientific research for …

Flash-profilometry is a novel measurement approach based on the fullfield lensless
acquisition of spectral holograms. It is based on spectral sampling of the mutual coherence …

Typical 3-D topography sensors for the measurement of surface structures in the micro-and
nanometre range are atomic force microscopes (AFMs), tactile stylus instruments, confocal …

With increasing miniaturization and rising demands on the manufacturing accuracy of
surface structures in the micro-and nanometer range, the requirements for measurement …