Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

With the rapid advancement and widespread applications of information technology in the
manufacturing shop floor, a huge amount of real-time data is generated, providing a good …

Cyber-physical systems have been highly integrated into many contemporary
infrastructures. As this integration deepens, the importance of protecting these systems from …

This work studies the robust deadlock control of automated manufacturing systems with
multiple unreliable resources. Our goal is to ensure the continuous production of the jobs …

Deadlock resolution has been an important research topic in the field of automated
manufacturing systems (AMSs). Researchers generally assume that AMS resources never …

Nowadays, wafer fabrication in semiconductor manufacturing is highly dependent on cluster
tools. A cluster tool is equipped with several process modules (PMs) and a wafer handling …

In an automated manufacturing system (AMS), resources are, in general, subject to
unpredictable failures, which invalidate many existing deadlock control strategies. In this …

It is theoretically and practically significant to synthesize a maximally permissive (optimal)
controller to prevent deadlocks in an automated manufacturing system (AMS). With an AMS …

A dual-gripper robotic cell consists of multiple processing machines and one material
handling robot, which can perform an unloading or a loading task one at a time but can hold …

Multi-cluster tools are widely used in majority of wafer fabrication processes in
semiconductor industry. Smaller lot production, thinner circuit width in wafers, larger wafer …