Study on surface thermal oxidation of silicon carbide irradiated by pulsed laser using reactive molecular dynamics

H An, J Wang, F Fang - The Journal of Chemical Physics, 2023 - pubs.aip.org
Pulsed lasers are a powerful tool for fabricating silicon carbide (SiC) that has a hard and
brittle nature, but oxidation is usually unavoidable. This study presents an exploration of the …

Material removal on silicon towards atomic and close-to-atomic scale by infrared femtosecond laser

H An, J Wang, F Fang - Materials Science in Semiconductor Processing, 2023 - Elsevier
Ultrashort laser pulse is a widely used tool for high precision machining. However, the
understanding on its minimum removal is still unclear. In this paper, single laser pulse (232 …

Atomic and close-to-atomic scale manufacturing: status and challenges

H Hafeez, W Xie, X Luo - 2023 28th International Conference …, 2023 - ieeexplore.ieee.org
Next-generation lithography techniques such as Extreme Ultraviolet Lithography have
started to reach their physical limits and will not be able to meet the requirements of future …

[HTML][HTML] Ultra-precision diamond finishing of reaction-sintered silicon carbide enhanced by vibration-assisted photocatalytic oxidation

Z Geng, Y Liang, F Fang - Journal of Materials Processing Technology, 2024 - Elsevier
RS-SiC faces limitations in surface accuracy with conventional finishing processes due to its
high mechanical hardness and multiphase nature. In this study, vibration-assisted …

Periodic surface structure of 4H-SiC by 46.9 nm laser

H An, J Wang, H Cui, F Fang - Optics Express, 2023 - opg.optica.org
This paper presents an experimental study on the laser-induced atomic and close-to-atomic
scale (ACS) structure of 4H-SiC using a capillary-discharged extreme ultraviolet (EUV) pulse …

Investigation of the Multimechanism Laser Cleaning Dynamics for Rough Fused Silica Surfaces with Organic Contaminants: A Computational Simulation and Atomic …

T Wang, Q Bai, Y Li, W Guo, H Wang, Y Dou, X Liu - Langmuir, 2023 - ACS Publications
The detrimental impact of organic contaminants on optical components poses a significant
obstacle to high-energy laser systems. However, irregularities or defects on the surface of …

External stress switching water corrosion behavior of SiC

Y Wang, J Li, Y Li, Y Huang, J Bin, C Xiao, Y Lu… - Ceramics …, 2024 - Elsevier
As the promising thermal material for the hot-end components of the next-generation
advanced gas turbine engines, the operation of SiC is threatened by high-temperature water …

Temperature-dependent water corrosion mechanism of silicon carbide: Atomic insights from reactive molecular dynamics simulation

P Shi, P Zhang, H Xu, J Xu, L Chen, L Qian… - Ceramics International, 2024 - Elsevier
Silicon carbide (SiC) is an ideal material for both aeronautics and space industries, but SiC
is highly susceptible to water corrosion at high temperature. A clear understanding of water …

[HTML][HTML] Experimental and MD simulation study of surface residual stress and surface quality of SiCp/Al in pulsed laser-ultrasonic assisted grinding

J Lin, B Fu, Y Gu, Y Xi, L Fu, S Wu, M Kang… - Journal of Materials …, 2024 - Elsevier
The utilisation of aluminium-based silicon carbide composites (SiCp/Al) is on the rise.
However, during the grinding process, where abrasive particles compel SiC particles into …

Exploring ablation of GaAs at atomic and close-to-atomic scale by pulsed laser and 3D TTM–MD simulations

H An, J Wang, F Fang, J Jiang - Optics & Laser Technology, 2024 - Elsevier
Pulsed laser technology offers significant advantages in atomic and closed-to-atomic scale
manufacturing due to its high-resolution capabilities in non-contact fabrication as well as its …