A method that allows the investigation of discharge transport mechanism in dielectric films
used in MEMS capacitive switches or MIM capacitors or even bare dielectric films is …

The present work attempts to provide a different approach to understand the distribution of
injected charge in Si-rich SiN films that find application in MEMS capacitive switches. The …

This work presents an in depth investigation regarding the effect of PECVD silicon nitride
(SiN x) stoichiometry on its charging mechanisms. The investigation took place in SiN x …

In the present work, we investigate thermally activated processes in nanostructured SiN x
films with embedded CNTs, which can be used in RF MEMS capacitive switches …

The present paper provides a novel, inexpensive and non-destructive method to assess the
surface charge density variance in capacitive RF-MEMS switches. The charge variance …

The present paper provides an inexpensive method to assess the surface charge density
variance directly in capacitive MEMS switches. It was found experimentally that the charge …

In this paper, dielectric charging process in dielectrics under bias voltage is investigated.
Dielectric materials, used in numerous devices in microelectronics, can be subjected to …

With the rapid progress in the wireless communication field, radio frequency microelectro-
mechanical systems (RF MEMS) are seen as one of the promising technologies to replace …