Accurate pattern transfer in wafer scanners necessitates the wafer stage and the reticle
stage executing a coordinated motion with the synchronization error in terms of nanometers …

We propose a generic nonlinear reduced-order tracking control method for elastic soft
robots. To this end, a new linear parameter varying (LPV) control framework is developed …

The uncertainties, force ripple, friction and other external disturbances in permanent magnet
linear synchronous motors (PMLSMs) pose great challenges to the design of advanced …

Iterative learning control (ILC) enables high performance for motion systems executing
repetitive tasks. The robustness filter of ILC enhances the robustness wrt model …

The aim of this article is to propose a novel rational feedforward tuning method, by directly
mapping the feedforward signal learned by dual-loop iterative learning control (DILC) onto …

Magnetically levitated (maglev) planar motor is a promising precision motion system in
industry. In order to address the issue of coupling effect in maglev planar motor and achieve …

The print productivity and medium dimensions of wide-format roll-to-roll printing systems are
limited by position errors induced by step-wise medium transportation. The aim of this article …

Iterative learning control (ILC) yields perfect output‐tracking performance at sampling
instances for systems that perform repetitive tasks. The aim of this article is to develop a …

Iterative Learning Control (ILC) can achieve perfect tracking performance for mechatronic
systems. The aim of this paper is to present an ILC design tutorial for industrial mechatronic …

The requirements for high accuracy and throughput in next-generation data-intensive motion
systems lead to situations where position-dependent feedforward is essential. This article …