Accompanying the unceasing progress of integrated circuit manufacturing technology, the
mainstream production mode of current semiconductor wafer fabrication is featured with …

In operating a multi-cluster tool, it needs to coordinate the activities of multiple robots. Thus,
it is very challenging to schedule it. This paper conducts a study on one-wafer cyclic …

Due to the trends of larger wafer diameters and smaller lot sizes, cluster tools need to switch
from processing one lot of wafers to another frequently. This leads to more transient periods …

For some wafer fabrication processes, such as an atomic layer deposition (ALD) process,
the wafers need to visit some process modules for a number of times. Using the existing …

Uncertainty in semiconductor fabrication facilities (fabs) requires scheduling methods to
attain quick real-time responses. They should be well tuned to track the changes of a …

There are wafer fabrication processes in cluster tools that require wafer revisiting. The
adoption of a swap strategy for such tools forms a 3-wafer cyclic (3-WC) period with three …

We examine a scheduling problem of cluster tools that concurrently process two wafer types
in a cyclic operational sequence. Whereas the process steps for different wafer types are …

This paper studies the challenging problem of scheduling single-arm multi-cluster tools with
wafer residency time constraints. They have a linear topology and their bottleneck tool is …

A timed Petri net (TPN) has been widely used for modeling, scheduling, and analyzing
discrete event dynamic systems. This study examines cyclic scheduling problems of a TPN …

This paper presents a general discrete-event system (DES)-based hard periodic real-time
task model. Based on supervisory control theory (SCT), an optimal priority-free real-time …