With the reduction of wafer batch size on account of the diversification and individuation of
consumption demands, increasing importance has been attached to the schedulability and …

With a combinatorial nature and hybrid characteristics, it is very challenging to schedule
crude oil operations in a refinery and, up to now, there is no software tool for practical use in …

This work investigates a scheduling problem of deadlock-prone flexible manufacturing
systems modeled by place-timed Petri nets. It proposes an anytime branch and bound …

To review the present scenario of the research on the scheduling and control of the
production process in the manufacturing industry, this comprehensive article has extensively …

A cluster tool that consists of several processing modules, a transport robot, and loadlocks is
widely used for wafer processing in the semiconductor industry. The cluster tool repeats an …

Some wafer fabrication processes require a wafer to visit some processing modules in a
cluster tool multiple times, leading to a wafer revisiting process. They may pose wafer …

Robotized cluster tools for semiconductor manufacturing have strict time constraints such
that a wafer processed at a processing chamber should be unloaded within a specified time …

Wafer revisiting and residency time constraints complicate the scheduling problem of cluster
tools in semiconductor manufacturing. Random disturbance to the activity time in operating a …

This paper addresses the scheduling problem of single-arm cluster tools with both wafer
residency time constraints and activity time variation in semiconductor manufacturing. Based …

Nowadays, security and scheduling are the most crucial aspects of each distributed real-
time application due to the rapidly enhanced use of such applications. This study presents a …