Complex multi-cluster tools have been extensively used in semiconductor manufacturing. It
is crucial to increase their productivity by their effective operation. With structural complexity …

Cluster tools have been extensively used for many semiconductor manufacturing processes
such as lithograph, etching, deposition, and testing. Most previous studies on cluster tool …

For a class of Petri nets whose uncontrollable influence subnets are forward synchronization
and backward conflict-free nets, this paper proposes an algorithm to transform a given …

In semiconductor manufacturing, wafer residency time constraints make the scheduling
problem of cluster tools complicated. A process module (PM) in cluster tools is prone to …

This paper presents a scheduling method for semiconductor manufacturing systems through
utilizing a case-based reasoning approach that consists of modeling, casebase building …

In a multi-cluster tool, there may be both single and dual-arm cluster tools. Such a multi-
cluster tool is called hybrid multi-cluster tool. To operate such a multi-cluster tool, one needs …

Due to the different behavior of single-arm and dual-arm cluster tools, it is challenging to
schedule a hybrid multi-cluster tool containing both of them. This paper aims to find an …

Residence time constraints are commonly seen in practical production systems, where the
time that intermediate products spend in a buffer is limited within a certain range. Parts have …

To ensure wafer quality, engineers have to impose wafer residency time constraints and
chamber cleaning operations on cluster tools; this has been widely used in semiconductor …

We consider a scheduling problem of a robotized cluster tool for semiconductor
manufacturing, which should control wafer delays within a chamber so as not to exceed a …