Cyclic scheduling and operation of a residency time-constrained single-arm cluster tool with
failure-prone process modules are highly challenging. In some cases, when a failure occurs …

Owing to large production capacity and high efficiency, multibridge machining systems
(MBMSs) have gained increasing attention in industry. Their multiple bridge machines work …

The trends of increasing wafer diameter and smaller lot sizes have led to more transient
periods in wafer fabrication. For some wafer fabrication processes, such as atomic layer …

Nowadays, high-throughput screening (HTS) systems are widely used in pharmaceutical
industries and laboratories for the discovery of new drugs and biomedical substances. It is …

For some wafer fabrication processes, the wafers need to visit some processing modules for
a number of times, which is referred to as the revisiting process. With wafer revisiting, it is …

Cluster tools are the key equipment in semiconductor manufacturing systems. They have
been widely adopted for many wafer fabrication processes, such as chemical and physical …

We examine a cyclic scheduling problem of sequentially connected cluster tools with a
single input and output module, which includes multi-cluster tools and linear cluster tools …

Nowadays, cluster tools are extensively used for many wafer manufacturing processes, such
as coating, lithograph, developing, etching, deposition, and testing. Traditional process …

In semiconductor manufacturing, cluster tools tend to integrate a vacuum module (VM), a
loadlock module (LLM), and an equipment front-end module (EFEM). While scheduling …

The performance of a swap sequence is analyzed by assuming cyclic scheduling in dual-
armed cluster tools with processing time variations. A dual-armed cluster tool consists of …