Adaptive scheduling of cluster tools with wafer delay constraints and process time variation
A cluster tool consists of several single-wafer processing chambers and a wafer-handling
robot. Cluster tools are widely used for wafer fabrication in semiconductor manufacturing …
robot. Cluster tools are widely used for wafer fabrication in semiconductor manufacturing …
Schedule restoration for single-armed cluster tools
The idle time between two consecutive tasks may seriously affect the wafer quality in some
wafer fabrication processes requiring high temperature and pressure. Hence, a cluster tool …
wafer fabrication processes requiring high temperature and pressure. Hence, a cluster tool …
A configurable state class method for temporal analysis of time Petri nets
A task's end-to-end delay in its execution is a key requirement to real-time systems. This
paper presents a configurable state class method based on time Petri nets for their …
paper presents a configurable state class method based on time Petri nets for their …
Optimal one-wafer cyclic scheduling of single-arm multicluster tools with two-space buffering modules
A multi-cluster tool is composed of a number of individual cluster tools linked by buffering
modules (BMs). The capacity of a BM can be one or two. Aiming at finding an optimal one …
modules (BMs). The capacity of a BM can be one or two. Aiming at finding an optimal one …
Optimal one-wafer cyclic scheduling of time-constrained hybrid multicluster tools via Petri nets
Scheduling a multicluster tool with wafer residency time constraints is highly challenging yet
important in ensuring high productivity of wafer fabrication. This paper presents a method to …
important in ensuring high productivity of wafer fabrication. This paper presents a method to …
-Cyclic Schedules and the Worst-Case Wafer Delay in a Dual-Armed Cluster Tool
DH Roh, TG Lee, TE Lee - IEEE Transactions on …, 2019 - ieeexplore.ieee.org
In a cluster tool for semiconductor manufacturing, a wafer waits within a chamber after
processing until it is unloaded by the robot. Such wafer delays degrade wafer quality due to …
processing until it is unloaded by the robot. Such wafer delays degrade wafer quality due to …
Controlled wafer release in clustered photolithography tools: Flexible flow line job release scheduling and an LMOLP heuristic
K Park, JR Morrison - IEEE Transactions on Automation …, 2014 - ieeexplore.ieee.org
As a clustered photolithography tool (CPT) in semiconductor wafer manufacturing can cost
as much as US $100 million, it must be operated efficiently. To maximize throughput, wafers …
as much as US $100 million, it must be operated efficiently. To maximize throughput, wafers …
Analysis of backward sequence for single-armed cluster tools with processing time variations
This article analyzes the backward sequence for single-armed cluster tools with processing
time variations. The backward sequence is popularly used to operate a single-armed cluster …
time variations. The backward sequence is popularly used to operate a single-armed cluster …
Optimal one-wafer cyclic scheduling of hybrid multirobot cluster tools with tree topology
A hybrid multirobot cluster tool is composed of both single and dual-arm robotic cluster tools.
Since the behavior of different individual tools is different, it is very challenging to coordinate …
Since the behavior of different individual tools is different, it is very challenging to coordinate …
Non-cyclic scheduling of a wet station
We examine a non-cyclic scheduling problem of a wet station that performs cleaning
processes for removing residual contaminants on wafer surfaces. Several chemical and …
processes for removing residual contaminants on wafer surfaces. Several chemical and …