In this research, we examine feedback control-based cluster tool scheduling methods to
maintain consistent wafer sojourn times when a tool is subject to random disruptive events …

In semiconductor manufacturing, multi-space process modules (PMs) are adopted in some
cluster tools for wafer processing. With multi-space PMs, a PM can have multiple wafers …

In semiconductor manufacturing, to improve the throughput of cluster tools, process modules
(PMs) are designed to have multiple spaces such that more than one wafers can be …

To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with
residency time and reentrant constraints, a heuristic scheduling algorithm was developed …

To effectively respond to the changing market demands, a manufacturer should produce
variety of products with small lots. Thus, multiple products (models) are assembled …

Cluster tools play a significant role in the entire process of wafer fabrication. As the width of
circuits in semiconductor chips shrinks down to less than 10nm, strict operational constraints …

For semiconductor manufacturing, automatic optical inspections (AOIs) are important for chip
quality inspection. An AOI system contains a robot arm, an industrial camera, a xy platform …

This paper considers multi-degree cyclic scheduling in automated electroplating lines with
multiple hoists. In a line, hoists share the same overhead track and cannot cross over each …

组合设备是半导体晶圆制造的核心装备, 其调度与控制优化是半导体制造领域极具挑战性的课题
. Petri 网因其强大的建模能力和简约的图形化表达优势, 被广泛地应用于组合设备的建模与调度 …

We present a high-performance and real-time production scheduling algorithm for digital
print production based on a dynamic incremental evolutionary algorithm. The optimization …