In semiconductor manufacturing systems, a time-constrained multi-cluster tool should be
scheduled such that a wafer stays in a process chamber in a given time range to satisfy a …

A timed discrete event system, which repeats identical work cycles, has task delays due to
synchronization between work cycles. Real such systems tend to operate mostly in a K …

Multi-cluster tools are widely adopted in wafer fabrication. It is of paramount importance to
schedule them to achieve their optimal throughput. This work intends to find their one-wafer …

众所周知, 生产调度问题属组合优化问题, 一般来说不存在求得精确最优解的多项式算法. 因此,
对于大规模调度问题, 人们应用启发式算法和元启发式算法以企求得满意解. 在实际的应用中 …

This paper introduces and implements a method for real-time mode scheduling in linear time-
varying switched systems subject to a quadratic cost functional. The execution time of …

Multi-cluster tools are automated equipment which is increasingly used in semiconductor
manufacturing. The scheduling of multi-cluster tools is much more challenging than single …

Nowadays, high throughput screening (HTS) systems are widely used in pharmaceutical
industries and laboratories for discovery of new drugs and biomedical substances. It is …

In semiconductor fabs, many key processes adopt cluster tools to process wafers. For some
processes, such as atomic layer deposition and plasma enhanced chemical vapor …

Dual-armed cluster tools for semiconductor manufacturing typically have had two arms fixed
in opposite directions. Recently, new cluster tool robot systems with two independent robot …