A method determines an optimized production schedule of a production line including a
hybrid multi-cluster tool formed by a plurality of single-arm tools and dual-arm tools …

This chapter presents the applications of Petri nets (PNs) to complex system scheduling. It
proposes the introduction to basic concepts and extensions of PNs, a hierarchical coloured …

Recent trends of larger wafer and smaller lot sizes bring cluster tools with frequent lot
switches. Practitioners must deal with more transient processes during such switches …

With the circuit width of a wafer being decreased below 10 nanometers, it is important to
reduce the wafer delay time in a process module as much as possible since too long wafer …

In wafer fabrication, it is imperative to minimize the transient process of cluster tools for the
sake of on-demand and preventive maintenance. Due to the trend of multi-type and small …

Due to the trend of using larger wafer diameter and smaller lot size, cluster tools need to
Switch from processing one lot of wafers to another frequently. It leads to more transient …

With the trends of larger wafer diameters and smaller lot sizes, cluster tools are forced to
work during long transient processes. In order to improve productivity, there has growing …

Supervisory control reconfiguration has been paid more attention due to its capacity of
handling the uncertainties including resource failures, capability degradation, and task …