The scheduling problem of a multi-cluster tool with a tree topology whose bottleneck tool is
process-bound is investigated. A method for scheduling the multi-cluster tool to thereby …

Now a days Jobs are Scheduled in a single processor or more than one processor, a real
time job is scheduled or executed based on requirements, An Successful task in embedded …

A critical review on Cuckoo Optimization Algorithm to solve complex engineering optimisation
problems, Where and how it Apply? Page 1 JOURNAL OF TRANSLATIONAL ENGINEERING …

Cluster tools are widely used manufacturing equipment in semiconductor manufacturing
systems and consist of several process chambers, loadlock modules, and a wafer transport …

Wafer fabrication tends to small batch, and single wafer processing is effective in cluster
tools. With the decrease of processes, redundant processing modules are adopted to …

Since single and dual-arm tools behave differently, it is difficult to coordinate their activities
in a hybrid multi-cluster tool that is composed of both single-and dual-arm tools. Aiming at …

In semiconductor manufacturing, when a wafer is processed, it requires unloading from its
process module in a given time interval, otherwise it is scraped. This requirement is called …