Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

Analog-to-digital converters based on sigma-delta modulators (ΣAM) are a popular choice
for high resolution conversion from the analog to the digital domain. With relatively small …

We report a new silicon Microelectromechanical systems (MEMS) accelerometer based on
differential frequency modulation (FM) with experimentally demonstrated thermal …

There has recently been much debate about the influence of social capital on health
outcomes. In particular it has been suggested that levels of social capital vary from place to …

This paper presents the design and implementation of a high-order/spl Sigma//spl
Delta/interface for micromachined inertial sensors, which employs an electronic filter in …

In this paper, design, implementation and characterization of a 3-V switched-capacitor (SC)<
formula formulatype=" inline">< tex> ΔΣ</tex></formula> CMOS interface circuit for the …

In this paper, we describe the system architecture and prototype measurements of a MEMS
gyroscope system with a resolution of 0.025 ^∘/s/\rmHz. The architecture makes extensive …

In recent years, social media has revolutionized how people communicate and share
information. Twitter and other blogging sites have seen an increase in political and social …

This paper presents a full wafer, dicing free, dry release process for MEMS silicon-on-
insulator (SOI) sensors and actuators. The developed process is particularly useful for …

The high-order mechanical resonances of the sensing element in a high-vacuum
environment can significantly degrade the noise and distortion performance of seismic …