Atomic layer deposition (ALD) for high‐quality conformal inorganic thin films is one of the
cornerstones of modern microelectronics, while molecular layer deposition (MLD) is its less …

The reliable, high-sensitive, wireless, and affordable requirements for humidity sensors are
needed in high-precision measurement fields. Quartz crystal microbalance (QCM) based on …

Soft biomaterials are a crucial component in several application fields. They are used, for
example, in biomedical implants, biosensors, drug delivery systems as well as in tissue …

The ability to control the surface chemistry of inorganic oxides has a profound impact on
numerous applications, including lubrication, antifouling, and anticorrosion. While often …

In this work, thermal atomic layer deposition (ALD) was used to synthesize vanadium (V)-
doped TiO 2 thin nanofilm on polypropylene (PP) hernia meshes. Multiple layers of (Al 2 O …

The deposition rate and properties of MLD films are for a large part determined by what
happens during the reactant exposure step. In some cases, however, the purge step is of …

Molecular layer deposition (MLD) offers molecular level control in deposition of organic and
hybrid thin films. This article describes a new type of inorganic–organic silicon-based MLD …

Incorporating inorganic components in organosiloxane polymer thin films for enhanced
mechanical properties could enable better durability and longevity of functional coatings for …

The in situ free carbon formation in polymer-derived ceramics (PDCs) is essential for its
microstructure evolution and resulting unique characteristics. This study advances the …

This paper presents preparation of boron‐doped Al2O3 thin films by atomic layer deposition
(ALD) using phenylboronic acid (PBA) and trimethylaluminum (TMA) as precursors …