Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

We address a robotic flow shop scheduling problem where two part types are processed on
each given set of dedicated machines. A single robot moving on a fixed rail transports one …

A key factor of win–win cloud economy is how to trade off between the application
performance from customers and the profit of cloud providers. Current researches on cloud …

In semiconductor manufacturing, there are wafer fabrication processes with wafer revisiting.
Some of them must meet wafer residency time constraints. Taking atomic layer deposition …

In wafer fabrication, a robotic cluster tool is required to be closed down in order for
engineers to perform its on-demand and preventive maintenance and switch between …

Scheduling of a robotic flow shop, where a dual-gripper robot transports parts between
machines, is addressed with a makespan measure. Most previous studies on robotic flow …

A robotic cluster tool involves many activities whose time is subject to some disturbance,
thus leading to the activity time variation. It results in wafer sojourn time fluctuation in a …

Nowadays, wafer fabrication in semiconductor manufacturing is highly dependent on cluster
tools. A cluster tool is equipped with several process modules (PMs) and a wafer handling …

Due to the trends of larger wafer diameters and smaller lot sizes, cluster tools need to switch
from processing one lot of wafers to another frequently. This leads to more transient periods …

This paper reviews and classifies literature on operational control of discrete event logistics
systems (DELS). Operational control manipulates the flow of items through a DELS. Each …