This paper presents the design, modeling, and fabrication of a planar three-degrees-of-
freedom parallel kinematic manipulator, fabricated with a simple two-mask process in …

In this paper, we discuss the use of pulse width modulation (PWM) to control analog MEMS
devices. We achieve a precise linear analog control of MEMS by applying PWM signal with …

The design, fabrication and characterization of a large displacement bidirectional MEMS
stage is presented in this paper. The V-shape electro-thermal actuator, micro lever, pawl and …

We propose pitch-variable guided resonance filters for continuous resonant-wavelength
tuning at telecom frequencies. Since the optical response is affected by not only the grating …

The combination of three-dimensional microassembly and bulk micromachining allows
manufacturing robots that are small, precise, dexterous and that have a large payload …

Capacitive comb actuators are widely used as MEMS motors due to their long range of
linear motion, low power consumption, and ease of fabrication. Here, we present data from a …

We describe a microelectromechanical systems-based actuator for three-dimensional (3D)
positioning of a polymer microlens implemented using silicon-on-glass technology. The …

This paper presents the design, fabrication methods and experimental results for a MEMS-
based out-of-plane electromagnetic motion stage for scanning applications. The …

This paper presents a comprehensive analytical model for a Z-shaped electrothermal
microactuator operating in air condition. The model provides the estimate of the tip …

Piezoelectric micromechanical actuators are featured with a low driving voltage, fast
response and large-range output, which make them desirable for applications of long-term …