This paper presents a unique four-axis articulated MEMS robot, constructed by
microassembly, targeting micro and nano scale manipulation and probing applications. The …

This study presents an experimental demonstration of the motion characteristics of a comb-
drive actuator fabricated from heterogeneous structure and applied for cryogenic …

Piezoelectric actuators are widespread in the design of micro/nanorobotic tools and
microsystems. Studies toward the integration of such actuators in complex micromechatronic …

This work develops an image stabilizer (IS) that is fabricated using micro-electro-mechanical
system (MEMS) technology and is designed to counteract the vibrations when human using …

A MEMS actuator for micrometric displacements in the out-of-plane direction is proposed in
this paper. The device is based on a compliant micromechanism composed of a thick layer …

MEMS technology is being investigated to improve the performance, integration and cost of
nanopositioning systems. The most basic MEMS fabrication processes produce designs …

For a vibration system, the best designed spring is compliant to a desired vibration mode
while it is robust to other undesired modes. There are several types of spring design for …

This work presents micro-machined electrostatic actuator arrays capable of producing
relatively large forces and wide displacement ranges. The actuators are comprised of a …

This paper reports the novel design, fabrication and testing of a chip-level-assembled comb-
drive XYZ-microstage that produces large displacements into X-, Y-, and Z-directions for the …

The purpose of this research is to design a novel parallel kinematic micro-electro-
mechanical systems (MEMS) XY nanopositioner. It is challenging to design a MEMS XY …