The capability of producing highly-accurate mechanical motion with nanometer or sub-
nanometer resolution is the defining characteristic of nanopositioners. With this motion …

This work outlines the instrumentation and actuation of a MEMS nanopositioner,
implementing a switching electronics based self-sensing actuation technique. Self-sensing …

This topical review discusses recent development and trends on scanning micromirrors for
biomedical applications. This also includes a biomedical micro robot for precise …

Over the last few decades, various micro-electromechanical (MEMS) transducers utilizing
different actuation and sensing mechanisms have been demonstrated and many of them …

This paper presents recent research progress in the manufacturing of MEMS based robotic
positioning technology. The goal is to configure a nanofactory consisting of multiple …

We report an integrated micro-actuator for independent control of the displacement in three
orthogonal directions. Electrostatic comb drives are employed for controlling the displace …

A microsystem has a first support element and a second support element, wherein a relative
position of the first support element and the second support element among each other is …

This paper presents a design and analysis approach for micropositioning stage based on 3-
RPR parallel kinematic linkage. The dimensions of the stage are first obtained and static …

A platform includes first and second actuation layers. The first actuation layer includes first
and second frames and a plurality of actuators connected between the first frame and the …

3D structures of MEMS devices will have more possibility to develop new functionalities and
challenging researches. There are many methods to make 3D structures using bending and …