Thermodynamic modeling of the chemical vapor deposition of films of complex composition
in the Si–B–N–C–H system at reduced pressure (0.01 Torr) in a wide temperature range …

The deposition of polybenzimidazole (PBI)‐like thin films by molecular layer deposition is
reported here for the first time using isophthalic acid (IPA) and 3, 3′‐diaminobenzidine …

This feature article presents insights concerning the correlation of PECVD and PEALD thin
film structures with their barrier or membrane properties. While in principle similar precursor …

Вторая часть обзора посвящена анализу областей и результатов применения
нанотехнологии на основе молекулярного наслаивания в различных отраслях …

In this work, the vapor-phase infiltration (VPI) of polyethylene terephthalate (PET) fabrics
with trimethylaluminum (TMA) and coreaction with water vapor is explored as a function of …

In this paper, the deposition of pyrrone thin film materials by molecular layer deposition
(MLD) is reported for the first time using pyromellitic dianhydride (PMDA) and 3, 3' …

There is an increasing interest in atomic layer deposition (ALD) on polymers for the
development of membranes, electronics,(3D) nanostructures and specially for the …

It is highly critical to acquire desirable performance and durability of materials for various
engineering applications. To overcome these issues, in recent years, studies on …

Selective deposition of hybrid and inorganic materials inside nanostructures could enable
major nanotechnological advances. However, inserting ready-made composites inside …

Проведено термодинамическое моделирование процесса химического осаждения из
газовой фазы (chemical vapor deposition, CVD) пленок сложного состава в системе Si–B …