[HTML][HTML] In multi electron beam systems,“Neighbours Matter”
A Mohammadi-Gheidari, ER Kieft, X Guo, M Wisse… - Ultramicroscopy, 2023 - Elsevier
In the Multi beam source (MBS) of our Multi Beam Scanning Electron Microscope (MBSEM),
an aperture lens array (ALA) splits the emission cone of the Schottky field emitter into …
an aperture lens array (ALA) splits the emission cone of the Schottky field emitter into …
Trajectory displacement in a multi beam scanning electron microscope
The analytical theory of statistical Coulomb interactions allows to determine the trajectory
displacement in a single rotationally symmetrical beam with well-behaved spatial and …
displacement in a single rotationally symmetrical beam with well-behaved spatial and …
[PDF][PDF] Stochastic Coulomb interactions in a multi-beam scanning electron microscope
JAN STOPKA - is.muni.cz
A multi-beam scanning electron microscope is an emerging technology for increasing the
throughput of electron microscopy. A study of the optical properties of such a system usually …
throughput of electron microscopy. A study of the optical properties of such a system usually …