Deformable electronics have found various applications and elastomeric materials have
been widely used to reach flexibility and stretchability. In this Letter, we report an alternative …

This paper reviews flexible skin technologies that enable monolithic integration of silicon
CMOS circuits and high temperature MEMS devices on flexible substrates. The monolithic …

A simplified, cost-effective flexible micro-electronic-mechanical systems (MEMS) technology
has been developed for realizing a temperature-sensing array on a flexible polyimide …

This letter reports a parylene cable structure that can significantly increase the robustness of
flexible devices based on a silicon-island structure. In our previous work, it has been …

The laser sensing technique with visual laser beam has been an increasing interest in large-
scale 3D measurement. However, a major limitation has been the high-accuracy positioning …

This paper reports a simple flexible electronics technology that is compatible with silicon-on-
insulator (SOI) complementary-metal-oxide-semiconductor (CMOS) processes. Compared …

Previous works on lateral photovoltaic effect (LPE) were mostly limited to one dimension, but
this paper explored two-dimensional characteristics of metal-oxide-semiconductor (MOS) …

Thin‐film silicon deposited by plasma‐enhanced chemical vapour deposition (PECVD),
encompasses both hydrogenated amorphous silicon (a‐Si: H) and 'nanocrystalline …

Fabrication of Ge-based thermocouple on polyethylene-terephthalate (PET) plastic
substrates is reported. The amorphous Ge film, deposited using electron beam evaporation …

Inherently, most MEMS devices are fabricated on rigid substrates. However, for a wide
variety of applications, it has long been desirable that sensors, actuators, or circuits can be …