The effects of air flow on the resonance properties of microcantilevers
SE Gregor - 2003 - trace.tennessee.edu
The development of the atomic force microscope introduced the idea of using a microlength
cantilever to detect a microsized phenomenon. It was found that a microlength cantilever …
cantilever to detect a microsized phenomenon. It was found that a microlength cantilever …
Devices based on semiconductor nanowires
Recently, nanoelectromechanical systems (NEMS) have attracted much attention due to
their unique properties and possible applications that differ greatly from those of …
their unique properties and possible applications that differ greatly from those of …
A critical comparison and development of nano-mechanical characterization of MEMS/NEMS thin film materials
This paper compared the three different methods for determination of thin film modulus or
MEMS applications: 1) scanning bending cantilever, 2) nanoindentation and 3) resonance …
MEMS applications: 1) scanning bending cantilever, 2) nanoindentation and 3) resonance …