Scheduling Single-Arm Multicluster Tools for Two-Type Wafers With Lower-Bound Cycle Time

QH Zhu, GH Wang, NQ Wu, Y Qiao… - … on Systems, Man …, 2023 - ieeexplore.ieee.org
In today's semiconductor manufacturing industry, wafer foundries often face the challenge of
producing a variety of integrated circuit chip products using a single manufacturing line. To …
被引用次数：2 相关文章

Scheduling Single-Arm Multicluster Tools for Two-Type Wafers With Lower-Bound Cycle Time

QH Zhu, GH Wang, NQ Wu, Y Qiao… - … on Systems, Man …, 2023 - researchwith.njit.edu
In today's semiconductor manufacturing industry, wafer foundries often face the challenge of
producing a variety of integrated circuit chip products using a single manufacturing line. To …