Scheduling cluster tools in semiconductor manufacturing: Recent advances and challenges
Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …
controlled process modules. They have been increasingly used for wafer fabrication. This …
Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges
CR Pan, MC Zhou, Y Qiao… - IEEE Transactions on …, 2018 - researchwith.njit.edu
Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …
controlled process modules. They have been increasingly used for wafer fabrication. This …
[PDF][PDF] Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges
CR Pan, MC Zhou, Y Qiao, NQ Wu - researchgate.net
Cluster tools are automated robotic manufactur-ing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …
controlled process modules. They have been increasingly used for wafer fabrication. This …