Recent progress in materials issues for piezoelectric MEMS

P Muralt - Journal of the American Ceramic Society, 2008 - Wiley Online Library
Piezoelectric materials play a crucial role in a large number of devices and applications
modern society would not like to miss. Mobile phones and ultrasonic imaging are just the …
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[引用][C] Recent progress in materials issues for piezoelectric MEMS

P Muralt - Journal of the American Ceramic Society, 2008 - infoscience.epfl.ch
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Recent Progress in Materials Issues for Piezoelectric MEMS

P Muralt - Journal of the American Ceramic Society, 2008 - cir.nii.ac.jp
抄録< jats: p>< jats: bold> Piezoelectric materials play a crucial role in a large number of
devices and applications modern society would not like to miss. Mobile phones and …

Recent Progress in Materials Issues for Piezoelectric MEMS.

P Muralt - Journal of the American Ceramic Society, 2008 - search.ebscohost.com
Piezoelectric materials play a crucial role in a large number of devices and applications
modern society would not like to miss. Mobile phones and ultrasonic imaging are just the …

[引用][C] Recent Progress in Materials Issues for Piezoelectric MEMS

P MURALT - Journal of the American Ceramic Society, 2008 - pascal-francis.inist.fr
Recent Progress in Materials Issues for Piezoelectric MEMS CNRS Inist Pascal-Francis CNRS
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