PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films

T De Los Arcos, P Awakowicz, M Böke… - Plasma Processes …, 2024 - Wiley Online Library
This feature article presents insights concerning the correlation of plasma‐enhanced
chemical vapor deposition and plasma‐enhanced atomic layer deposition thin film …
被引用次数：2 相关文章

PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films

T de los Arcos, P Awakowicz, M Böke… - arXiv e …, 2023 - ui.adsabs.harvard.edu
This feature article presents insights concerning the correlation of PECVD and PEALD thin
film structures with their barrier or membrane properties. While in principle similar precursor …
[PDF] academia.edu

[PDF][PDF] PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films

T de los Arcos, P Awakowicz, M Böke, N Boysen… - academia.edu
PEALD thin film structures with their barrier or membrane properties. While in principle
similar precursor gases and processes can be applied, the adjustment of deposition …
[PDF] researchgate.net

[PDF][PDF] PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films

T de los Arcos, P Awakowicz, M Böke, N Boysen… - researchgate.net
PEALD thin film structures with their barrier or membrane properties. While in principle
similar precursor gases and processes can be applied, the adjustment of deposition …

PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films

T De Los Arcos, P Awakowicz, M Böke, N Boysen… - 2023 - publica.fraunhofer.de
This feature article presents insights concerning the correlation of PECVD and PEALD thin
film structures with their barrier or membrane properties. While in principle similar precursor …

PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films

T Los Arcos, P Awakowicz, M Böke, N Boysen… - 2024 - publica.fraunhofer.de
This feature article presents insights concerning the correlation of plasma‐enhanced
chemical vapor deposition and plasma‐enhanced atomic layer deposition thin film …
[PDF] academia.edu

[PDF][PDF] PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films

T de los Arcos, P Awakowicz, M Böke, N Boysen… - academia.edu
PEALD thin film structures with their barrier or membrane properties. While in principle
similar precursor gases and processes can be applied, the adjustment of deposition …