[HTML][HTML] Additive nano-lithography with focused soft X-rays: basics, challenges, and opportunities

A Späth - Micromachines, 2019 - mdpi.com
Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write
nanofabrication of metallic nanostructures from metal organic precursor gases. It combines …

[PDF][PDF] Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities

A Späth - dora.lib4ri.ch
Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write
nanofabrication of metallic nanostructures from metal organic precursor gases. It combines …

[PDF][PDF] Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities

A Späth - core.ac.uk
Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write
nanofabrication of metallic nanostructures from metal organic precursor gases. It combines …

Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities.

A Späth - Micromachines, 2019 - search.ebscohost.com
Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write
nanofabrication of metallic nanostructures from metal organic precursor gases. It combines …

Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities

A Späth - Micromachines, 2019 - pubmed.ncbi.nlm.nih.gov
Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write
nanofabrication of metallic nanostructures from metal organic precursor gases. It combines …

[HTML][HTML] Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities

A Späth - Micromachines, 2019 - ncbi.nlm.nih.gov
Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write
nanofabrication of metallic nanostructures from metal organic precursor gases. It combines …

Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities

A Späth - Micromachines, 2019 - search.proquest.com
Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write
nanofabrication of metallic nanostructures from metal organic precursor gases. It combines …

Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities.

A Späth - Micromachines, 2019 - europepmc.org
Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write
nanofabrication of metallic nanostructures from metal organic precursor gases. It combines …