Compact three-axis actuator for positioning a polymer microlens in an optical pickup

P Li, LF Pan, H Zappe - Journal of microelectromechanical …, 2013 - ieeexplore.ieee.org
We describe a microelectromechanical systems-based actuator for three-dimensional (3D)
positioning of a polymer microlens implemented using silicon-on-glass technology. The …
被引用次数：17 相关文章

[引用][C] Compact Three-Axis Actuator for Positioning a Polymer Microlens in an Optical Pickup

PEI LI, LFA PAN, H ZAPPE - Journal of …, 2014 - pascal-francis.inist.fr
Compact Three-Axis Actuator for Positioning a Polymer Microlens in an Optical Pickup CNRS
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Compact Three-Axis Actuator for Positioning a Polymer Microlens in an Optical Pickup

P Li, LF Pan, H Zappe - Journal of Microelectromechanical Systems, 2014 - infona.pl
We describe a microelectromechanical systems-based actuator for three-dimensional (3D)
positioning of a polymer microlens implemented using silicon-on-glass technology. The …

[引用][C] Compact Three-Axis Actuator for Positioning a Polymer Microlens in an Optical Pickup

P Li, LF Pan, H Zappe - Journal of Microelectromechanical Systems, 2014 - cir.nii.ac.jp
Compact Three-Axis Actuator for Positioning a Polymer Microlens in an Optical Pickup | CiNii
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