Controlling levitation and enhancing displacement in electrostatic comb drives of MEMS actuators

M Imboden, J Morrison, E Lowell… - Journal of …, 2014 - ieeexplore.ieee.org
Capacitive comb actuators are widely used as MEMS motors due to their long range of
linear motion, low power consumption, and ease of fabrication. Here, we present data from a …
被引用次数：21 相关文章
[PDF] academia.edu

[PDF][PDF] Controlling Levitation and Enhancing Displacement in Electrostatic Comb Drives of MEMS Actuators

M Imboden, J Morrison, E Lowell, H Han… - JOURNAL OF …, 2014 - academia.edu
MEMS motors due to their long range of linear motion, low power consumption, and ease of
fabrication. Here, we present data from a thin comb capacitive actuator where fringe fields …

Controlling Levitation and Enhancing Displacement in Electrostatic Comb Drives of MEMS Actuators

M Imboden, J Morrison, E Lowell, H Han… - Journal of …, 2014 - infona.pl
Capacitive comb actuators are widely used as MEMS motors due to their long range of
linear motion, low power consumption, and ease of fabrication. Here, we present data from a …
[PDF] researchgate.net

[PDF][PDF] Controlling Levitation and Enhancing Displacement in Electrostatic Comb Drives of MEMS Actuators

M Imboden, J Morrison, E Lowell, H Han, DJ Bishop - researchgate.net
MEMS motors due to their long range of linear motion, low power consumption, and ease of
fabrication. Here, we present data from a thin comb capacitive actuator where fringe fields …
[PDF] academia.edu

[PDF][PDF] Controlling Levitation and Enhancing Displacement in Electrostatic Comb Drives of MEMS Actuators

M Imboden, J Morrison, E Lowell, H Han, DJ Bishop - academia.edu
MEMS motors due to their long range of linear motion, low power consumption, and ease of
fabrication. Here, we present data from a thin comb capacitive actuator where fringe fields …