Wafer sojourn time fluctuation analysis of time-constrained dual-arm cluster tools with wafer revisiting and activity time variation

Y Qiao, NQ Wu, FJ Yang, MC Zhou… - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
A robotic cluster tool involves many activities whose time is subject to some disturbance,
thus leading to the activity time variation. It results in wafer sojourn time fluctuation in a …
被引用次数：75 相关文章

Wafer sojourn time fluctuation analysis of time-constrained dual-arm cluster tools with wafer revisiting and activity time variation

Y Qiao, NQ Wu, FJ Yang, MC Zhou… - IEEE Transactions on …, 2018 - researchwith.njit.edu
A robotic cluster tool involves many activities whose time is subject to some disturbance,
thus leading to the activity time variation. It results in wafer sojourn time fluctuation in a …