Characterization of a mechanical motion amplifier applied to a MEMS accelerometer

I Zeimpekis, I Sari, M Kraft - Journal of Microelectromechanical …, 2012 - ieeexplore.ieee.org
In this paper, a mechanical amplification concept for microelectromechanical systems
(MEMS) physical sensors is proposed with the aim to improve their sensitivity. The scheme …
被引用次数：57 相关文章

[引用][C] Characterization of a Mechanical Motion Amplifier Applied to a MEMS Accelerometer

I ZEIMPEKIS, I SARI, M KRAFT - Journal of …, 2012 - pascal-francis.inist.fr
Characterization of a Mechanical Motion Amplifier Applied to a MEMS Accelerometer CNRS
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Characterization of a mechanical motion amplifier applied to a MEMS accelerometer

I Zeimpekis, I Sari, M Kraft - Journal of Microelectromechanical …, 2012 - orbi.uliege.be
In this paper, a mechanical amplification concept for microelectromechanical systems
(MEMS) physical sensors is proposed with the aim to improve their sensitivity. The scheme …

Characterization of a Mechanical Motion Amplifier Applied to a MEMS Accelerometer

I Zeimpekis, I Sari, M Kraft - Journal of Microelectromechanical Systems, 2012 - infona.pl
In this paper, a mechanical amplification concept for microelectromechanical systems
(MEMS) physical sensors is proposed with the aim to improve their sensitivity. The scheme …

Characterization of a mechanical motion amplifier applied to a MEMS accelerometer

I Zeimpekis, I Sari, M Kraft - Journal of Microelectromechanical …, 2012 - eprints.soton.ac.uk
In this paper, a mechanical amplification concept for microelectromechanical systems
(MEMS) physical sensors is proposed with the aim to improve their sensitivity. The scheme …

[引用][C] Characterization of a Mechanical Motion Amplifier Applied to a MEMS Accelerometer

I ZEIMPEKIS, I SARI, M KRAFT - Journal of …, 2012 - Institute of Electrical and Electronics …