[HTML][HTML] Molecular layer deposition of hybrid silphenylene-based dielectric film
X Li, M Vehkamäki, M Chundak, K Mizohata… - … Composites and Hybrid …, 2023 - Springer
Molecular layer deposition (MLD) offers molecular level control in deposition of organic and
hybrid thin films. This article describes a new type of inorganic–organic silicon-based MLD …
hybrid thin films. This article describes a new type of inorganic–organic silicon-based MLD …
[PDF][PDF] Molecular layer deposition of hybrid silphenylene‑based dielectric film
X Li, M Vehkamäki, M Chundak, K Mizohata… - 2023 - researchportal.helsinki.fi
Molecular layer deposition (MLD) offers molecular level control in deposition of organic and
hybrid thin films. This article describes a new type of inorganic–organic silicon-based MLD …
hybrid thin films. This article describes a new type of inorganic–organic silicon-based MLD …
[PDF][PDF] Molecular layer deposition of hybrid silphenylene‑based dielectric film
X Li, M Vehkamäki, M Chundak, K Mizohata… - 2023 - helda.helsinki.fi
Molecular layer deposition (MLD) offers molecular level control in deposition of organic and
hybrid thin films. This article describes a new type of inorganic–organic silicon-based MLD …
hybrid thin films. This article describes a new type of inorganic–organic silicon-based MLD …
[PDF][PDF] Molecular layer deposition of hybrid silphenylene‑based dielectric film
X Li, M Vehkamäki, M Chundak, K Mizohata… - 2023 - helda.helsinki.fi
Molecular layer deposition (MLD) offers molecular level control in deposition of organic and
hybrid thin films. This article describes a new type of inorganic–organic silicon-based MLD …
hybrid thin films. This article describes a new type of inorganic–organic silicon-based MLD …
[引用][C] Molecular layer deposition of hybrid silphenylene-based dielectric film
X Li, M Vehkamaki, M Chundak… - Advanced …, 2023 - researchportal.helsinki.fi
Molecular layer deposition of hybrid silphenylene-based dielectric film — University of Helsinki
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