Optimal one-wafer cyclic scheduling and buffer space configuration for single-arm multicluster tools with linear topology

L Bai, N Wu, Z Li, MC Zhou - IEEE Transactions on Systems …, 2016 - ieeexplore.ieee.org
This work studies the scheduling problem of a single-arm multicluster tool with a linear
topology and process-bound bottleneck individual tool. The objective is to find a one-wafer …
被引用次数：133 相关文章

[引用][C] Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools With Linear Topology

L Bai, N Wu, Z Li, MC Zhou - IEEE Transactions on Systems, Man, and …, 2016 - cir.nii.ac.jp
Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm
Multicluster Tools With Linear Topology | CiNii Research CiNii 国立情報学研究所 学術情報 …

Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools with Linear Topology

L Bai, N Wu, Z Li, M Zhou - IEEE Transactions on Systems …, 2016 - researchwith.njit.edu
This work studies the scheduling problem of a single-arm multicluster tool with a linear
topology and process-bound bottleneck individual tool. The objective is to find a one-wafer …