Real-time scheduling of single-arm cluster tools subject to residency time constraints and bounded activity time variation

Y Qiao, NQ Wu, MC Zhou - IEEE Transactions on Automation …, 2012 - ieeexplore.ieee.org
It is very challenging to schedule cluster tools subject to wafer residency time constraints
and activity time variation. This work develops a Petri net model to describe the system and …
被引用次数：99 相关文章

Real-time scheduling of single-arm cluster tools subject to residency time constraints and bounded activity time variation

Y Qiao, NQ Wu, MC Zhou - IEEE Transactions on Automation …, 2012 - researchwith.njit.edu
It is very challenging to schedule cluster tools subject to wafer residency time constraints
and activity time variation. This work develops a Petri net model to describe the system and …

[引用][C] Real-Time Scheduling of Single-Arm Cluster Tools Subject to Residency Time Constraints and Bounded Activity Time Variation

YAN QIAO, N WU, M ZHOU - IEEE transactions on automation …, 2012 - pascal-francis.inist.fr
Real-Time Scheduling of Single-Arm Cluster Tools Subject to Residency Time Constraints
and Bounded Activity Time Variation CNRS Inist Pascal-Francis CNRS Pascal and Francis …

[引用][C] Real-Time Scheduling of Single-Arm Cluster Tools Subject to Residency Time Constraints and Bounded Activity Time Variation

YAN QIAO, N WU, M ZHOU - IEEE …, 2012 - Institute of Electrical and Electronics …