Ultrathin hybrid SiAlCOH dielectric films through ring-opening molecular layer deposition of cyclic tetrasiloxane

K Ashurbekova, K Ashurbekova, I Saric… - Chemistry of …, 2021 - ACS Publications
Molecular layer deposition (MLD) is a powerful vapor phase approach for growing thin
polymer films with molecular-level thickness control. We applied the ring-opening MLD …
被引用次数：22 相关文章

Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane

K Ashurbekova, K Ashurbekova, I Saric, M Gobbi… - Chemistry of …, 2021 - croris.hr
Sažetak Molecular layer deposition (MLD) is a powerful vapor phase approach for growing
thin polymer films with molecular-level thickness control. We applied the ring-opening MLD …
[PDF] uniri.hr

[PDF][PDF] Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane

K Ashurbekova, K Ashurbekova, I Saric, M Gobbi… - phy.uniri.hr
Molecular layer deposition (MLD) is a powerful vapor phase approach for growing thin
polymer films with molecular-level thickness control. We applied the ring-opening MLD …
[PDF] uniri.hr

[PDF][PDF] Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane

K Ashurbekova, K Ashurbekova, I Saric, M Gobbi… - phy.uniri.hr
Molecular layer deposition (MLD) is a powerful vapor phase approach for growing thin
polymer films with molecular-level thickness control. We applied the ring-opening MLD …

Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane

K Ashurbekova, I Abdulagatov, M Gobbi, E Modin… - Chemistry of …, 2021 - elibrary.ru
Kr. A. thanks Dr. Aziz Abdulagatov for scientific discussions, feedback, and comments. MK is
grateful for funding from the Spanish Ministry of Science and Innovation (MICINN)[Grant …

Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane

K Ashurbekova, K Ashurbekova, I Saric, M Gobbi… - Chemistry of …, 2021 - croris.hr
Sažetak Molecular layer deposition (MLD) is a powerful vapor phase approach for growing
thin polymer films with molecular-level thickness control. We applied the ring-opening MLD …