Noncyclic scheduling of cluster tools with a branch and bound algorithm

HJ Kim, JH Lee, TE Lee - IEEE Transactions on Automation …, 2013 - ieeexplore.ieee.org
Cluster tools, each of which consists of multiple processing modules, one material handling
robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography …
被引用次数：109 相关文章

Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm

H Kim, JH Lee, TE Lee - IEEE TRANSACTIONS ON …, 2015 - koasas.kaist.ac.kr
Cluster tools, each of which consists of multiple processing modules, one material handling
robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography …

Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm

HJ Kim, JH Lee, TE Lee - IEEE Transactions on Automation Science and …, 2015 - infona.pl
Cluster tools, each of which consists of multiple processing modules, one material handling
robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography …

Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm

HJ Kim, JH Lee, TE Lee - IEEE Transactions on Automation Science …, 2015 - pure.kaist.ac.kr
Cluster tools, each of which consists of multiple processing modules, one material handling
robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography …

[引用][C] Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm

HJ Kim, JH Lee, TE Lee - IEEE Transactions on Automation Science and …, 2015 - cir.nii.ac.jp
Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm | CiNii Research
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