MEMS in Nanopositioning

M Maroufi, AG Fowler… - ACTUATOR 2018; 16th …, 2018 - ieeexplore.ieee.org
The capability of producing highly-accurate mechanical motion with nanometer or sub-
nanometer resolution is the defining characteristic of nanopositioners. With this motion …
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MEMS in Nanopositioning

M Maroufi, AG Fowler, SOR Moheimani - vde-verlag.de
The capability of producing highly-accurate mechanical motion with nanometer or sub-
nanometer resolution is the defining characteristic of nanopositioners. With this motion …