Petri net modeling and scheduling of a close-down process for time-constrained single-arm cluster tools

QH Zhu, MC Zhou, Y Qiao… - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
In wafer fabrication, a robotic cluster tool is required to be closed down in order for
engineers to perform its on-demand and preventive maintenance and switch between …
被引用次数：103 相关文章

Petri net modeling and scheduling of a close-down process for time-constrained single-arm cluster tools

Q Zhu, M Zhou, Y Qiao, N Wu - IEEE Transactions on Systems …, 2018 - researchwith.njit.edu
In wafer fabrication, a robotic cluster tool is required to be closed down in order for
engineers to perform its on-demand and preventive maintenance and switch between …
[PDF] ieee.org

[PDF][PDF] Petri Net Modeling and Scheduling of a Close-down Process for Time-constrained Single-arm Cluster Tools

QH Zhu, MC Zhou, Y Qiao, NQ Wu - ieeexplore.ieee.org
In wafer fabrication, a robotic cluster tool is required to be closed down in order for
engineers to perform its on-demand and preventive maintenance and switching between …