Accelerated ICP etching of 6H-SiC by femtosecond laser modification

Y Huang, F Tang, Z Guo, X Wang - Applied Surface Science, 2019 - Elsevier
A method for ultrafast etching of single crystal 6H-SiC by integrating a femtosecond laser
modification and inductively coupled plasma (ICP) etching is proposed in this paper. The …
被引用次数：47 相关文章

Accelerated ICP etching of 6H-SiC by femtosecond laser modification

Y Huang, F Tang, Z Guo, X Wang - Applied Surface Science, 2019 - ui.adsabs.harvard.edu
A method for ultrafast etching of single crystal 6H-SiC by integrating a femtosecond laser
modification and inductively coupled plasma (ICP) etching is proposed in this paper. The …