This paper presents a micro-scale air flow sensor based on a free-standing cantilever
structure. In the fabrication process, MEMS techniques are used to deposit a silicon nitride …

Utilizing conventional micro-electro-mechanical systems techniques, this study fabricates
and characterizes a novel micro gas flow sensor comprising four silicon nitride/silicon wafer …

This paper presents a novel technique for the fabrication of a micro humidity sensor with
suspending structures. A MEMS device is developed which uses thin-film platinum resistors …

This paper presents the fabrication and characterization of a curved-up piezoresistive
microcantilever flow sensor. The microcantilever sensor, fabricated with silicon-on-insulator …

We present nanoelectromechanical system based cantilever air flow sensor using silicon
nanowires (SiNWs). The cantilever is fabricated in the complementary metal-oxide …

We present a highly sensitive ultra-thin micromachined silicon cantilever beam with an
integrated strain gauge on its root for optimizing piezoresistive readout. The mechanical …

This paper presents the design, fabrication, and experimental results of an in-plane MEMS
capacitive flow sensor that uses the displacement of a micro-fabricated paddle caused by …

This study applies conventional micro-electro-mechanical systems (MEMS) techniques to
develop a novel low-cost humidity sensor comprising a silicon substrate, a freestanding …

Micro-electro-mechanical system (MEMS) devices integrate various mechanical elements,
sensors, actuators, and electronics on a single silicon substrate in order to accomplish a …

A microsensor for gas-flow sensing applications with high sensitivity (700 mV at a flow
velocity of 2.7 ms− 1 and a supply voltage of 3 V), low power consumption (8 mW at 55 K …