This topical review discusses recent development and trends on scanning micromirrors for
biomedical applications. This also includes a biomedical micro robot for precise …

Microelectromechanical systems (MEMS) have an unmatched ability to incorporate
numerous functionalities into ultra-compact devices, and due to their versatility and …

Growing demands for affordable, portable, and reliable optical microendoscopic imaging
devices are attracting research institutes and industries to find new manufacturing methods …

MEMS micromirror has a wide range of applications, such as laser projection, optical
communication, lighting detection and ranging medical imaging detection. In this paper, an …

The significant advancements within the electronics miniaturization field have shifted the
scientific interest towards a new class of precision devices, namely microelectromechanical …

MEMS laser scanning enables the miniaturization of endoscopic catheters for advanced
endomicroscopy such as confocal microscopy, multiphoton microscopy, optical coherence …

A novel silicon on insulator (SOI) MEMS process has been designed and developed to
realize a two axes thermally actuated single crystal silicon micromirror device, which …

This paper presents a 2-DOF silicon-on-insulator (SOI) microelectromechanical systems
(MEMS) mirror with sidewall (SW) electrodes. The biaxial MEMS mirror with SW is actuated …

We demonstrate a 3-D scanning micromirror device that combines 2-D beam scanning with
focus control in the same device using micro-electro-mechanical-systems (MEMS) …

Microelectromechanical system (MEMS) technology, and surface micromachining in
particular, have led to the development of miniaturized optical devices with a substantial …