Q control of an AFM microcantilever with double-stack AlN sensors and actuators

HM Nasrabadi, M Mahdavi… - IEEE Sensors …, 2022 - ieeexplore.ieee.org
Active Atomic Force Microscope (AFM) cantilevers with integrated actuator/sensor pairs
display larger feedthrough than conventional base excited cantilevers operating in …

Control of an Active AFM Cantilever With Differential Sensing Configuration

MB Coskun, H Alemansour, AG Fowler… - … on Control Systems …, 2018 - ieeexplore.ieee.org
Microcantilevers featuring separate built-in actuation and displacement sensing capabilities
allow effective and simple implementation of control methods, opening a pathway to …

AFM microcantilever with a collocated AlN sensor-actuator pair: Enabling efficient Q-control for dynamic imaging

M Mahdavi, N Nikooienejad… - Journal of …, 2020 - ieeexplore.ieee.org
This manuscript presents a novel microcantilever with an embedded piezoelectric sensor-
actuator pair for dynamic atomic force microscopy (AFM). The transducer pair is constructed …

[HTML][HTML] High resolution atomic force microscopy with an active piezoelectric microcantilever

H Mahmoodi Nasrabadi, M Mahdavi… - Review of Scientific …, 2022 - pubs.aip.org
Active microcantilevers with on-chip sensing and actuation provide significant advantages in
tapping mode Atomic Force Microscopy (AFM). Collocated transduction allows for effective …

A system dynamics approach to user independence in high speed atomic force microscopy

DJ Burns - 2010 - dspace.mit.edu
As progress in molecular biology and nanotechnology continues, demand for rapid and high
quality image acquisition has increased to the point where the limitations of atomic force …

Q control of a microfabricated piezoelectric cantilever with on-chip feedthrough cancellation

AG Fowler, MB Coskun… - 2017 IEEE Conference …, 2017 - ieeexplore.ieee.org
One of the major prerequisites to obtaining highspeed tapping-mode atomic force
microscopy (AFM) is a controllable quality (Q) factor. This can be achieved through the use …

High dynamic range AFM cantilever with a collocated piezoelectric actuator-sensor pair

M Mahdavi, MB Coskun… - Journal of …, 2020 - ieeexplore.ieee.org
We present a novel approach to fundamentally eliminate electrical feedthrough (cross-talk)
signal in self-sensing piezoelectric microcantilevers, used in dynamic mode atomic force …

[HTML][HTML] Robust atomic force microscopy using multiple sensors

M Baranwal, RS Gorugantu… - Review of Scientific …, 2016 - pubs.aip.org
Atomic force microscopy typically relies on high-resolution high-bandwidth cantilever
deflection measurements based control for imaging and estimating sample topography and …

[HTML][HTML] Modular apparatus for electrostatic actuation of common atomic force microscope cantilevers

CJ Long, RJ Cannara - Review of Scientific Instruments, 2015 - pubs.aip.org
Piezoelectric actuation of atomic force microscope (AFM) cantilevers often suffers from
spurious mechanical resonances in the loop between the signal driving the cantilever and …

Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing

MG Ruppert, SI Moore, M Zawierta, AJ Fleming… - …, 2019 - iopscience.iop.org
Atomic force microscope (AFM) cantilevers with integrated actuation and sensing provide
several distinct advantages over conventional cantilever instrumentation. These include …