PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films
T De Los Arcos, P Awakowicz, M Böke… - Plasma Processes …, 2024 - Wiley Online Library
This feature article presents insights concerning the correlation of plasma‐enhanced
chemical vapor deposition and plasma‐enhanced atomic layer deposition thin film …
chemical vapor deposition and plasma‐enhanced atomic layer deposition thin film …
PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth
T de los Arcos, P Awakowicz, J Benedikt… - Plasma Processes …, 2024 - Wiley Online Library
This feature article presents recent results on the analysis of plasma/polymer interactions
and the nucleation of ultra‐thin plasma films on polymeric substrates. Because of their high …
and the nucleation of ultra‐thin plasma films on polymeric substrates. Because of their high …
[HTML][HTML] Effect of nanoscopic defects on barrier performance of thin films deposited by plasma-enhanced atomic layer deposition on flexible polymers
RL Kovács, S Gyöngyösi, G Langer, E Baradács… - Thin Solid Films, 2021 - Elsevier
Penetration paths caused by nanoscopic defects in plasma-enhanced atomic layer
deposited (PEALD) Al 2 O 3 thin films could increase their transmission rate, mechanical …
deposited (PEALD) Al 2 O 3 thin films could increase their transmission rate, mechanical …
A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
M Gebhard, F Mitschker, C Hoppe… - Plasma Processes …, 2018 - Wiley Online Library
A combinatorial approach to deposit gas barrier layers (GBLs) on polyethylene terephthalate
(PET) by means of plasma‐enhanced chemical vapor deposition (PECVD) and plasma …
(PET) by means of plasma‐enhanced chemical vapor deposition (PECVD) and plasma …
[HTML][HTML] Foundations of plasma enhanced chemical vapor deposition of functional coatings
Since decades, the PECVD ('plasma enhanced chemical vapor deposition') processes have
emerged as one of the most convenient and versatile approaches to synthesize either …
emerged as one of the most convenient and versatile approaches to synthesize either …
[HTML][HTML] The importance of ions in low pressure PECVD plasmas
A Michelmore, JD Whittle, RD Short - Frontiers in Physics, 2015 - frontiersin.org
Plasma enhanced chemical vapor deposition (PECVD) can be used to fabricate surfaces
with a wide range of physical and chemical properties and are used in a variety of …
with a wide range of physical and chemical properties and are used in a variety of …
Recent advances in plasma deposition of functional coatings on polymers
L Martinu, MR Wertheimer… - MRS Online …, 1998 - cambridge.org
Plasma enhanced chemical vapor deposition (PECVD) is increasingly being applied for the
fabrication of functional coatings on polymeric substrates. This presentation briefly reviews …
fabrication of functional coatings on polymeric substrates. This presentation briefly reviews …
Evaluation of the membrane performance of ultra-smooth silicon organic coatings depending on the process energy density
L Kleines, S Wilski, P Alizadeh, J Rubner, M Wessling… - Thin Solid Films, 2022 - Elsevier
Plasma-enhanced chemical vapor deposition (PECVD) can be used to apply thin layers to
plastics with a wide range of customizable functionality. The selective permeation properties …
plastics with a wide range of customizable functionality. The selective permeation properties …
Plasma-enhanced chemical vapor deposition of functional coatings
Publisher Summary Functional coating systems can be fabricated by different deposition
techniques. Among the above processes, plasma-enhanced chemical vapour deposition …
techniques. Among the above processes, plasma-enhanced chemical vapour deposition …
Plasma Enhanced‐Chemical Vapor Deposited Polymers: Plasma Phase Reactions, Plasma–Surface Interactions, and Film Properties
M Creatore, A Perrotta - CVD Polymers: Fabrication of Organic …, 2015 - Wiley Online Library
The field of plasma enhanced‐chemical vapour deposition (PE‐CVD) of polymers is
fascinating because it succeeds in polymerizing monomer units also at low pressure (< 1 …
fascinating because it succeeds in polymerizing monomer units also at low pressure (< 1 …
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