PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films

T De Los Arcos, P Awakowicz, M Böke… - Plasma Processes …, 2024 - Wiley Online Library
This feature article presents insights concerning the correlation of plasma‐enhanced
chemical vapor deposition and plasma‐enhanced atomic layer deposition thin film …

PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth

T de los Arcos, P Awakowicz, J Benedikt… - Plasma Processes …, 2024 - Wiley Online Library
This feature article presents recent results on the analysis of plasma/polymer interactions
and the nucleation of ultra‐thin plasma films on polymeric substrates. Because of their high …

[HTML][HTML] Effect of nanoscopic defects on barrier performance of thin films deposited by plasma-enhanced atomic layer deposition on flexible polymers

RL Kovács, S Gyöngyösi, G Langer, E Baradács… - Thin Solid Films, 2021 - Elsevier
Penetration paths caused by nanoscopic defects in plasma-enhanced atomic layer
deposited (PEALD) Al 2 O 3 thin films could increase their transmission rate, mechanical …

A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD

M Gebhard, F Mitschker, C Hoppe… - Plasma Processes …, 2018 - Wiley Online Library
A combinatorial approach to deposit gas barrier layers (GBLs) on polyethylene terephthalate
(PET) by means of plasma‐enhanced chemical vapor deposition (PECVD) and plasma …

[HTML][HTML] Foundations of plasma enhanced chemical vapor deposition of functional coatings

R Snyders, D Hegemann, D Thiry… - Plasma Sources …, 2023 - iopscience.iop.org
Since decades, the PECVD ('plasma enhanced chemical vapor deposition') processes have
emerged as one of the most convenient and versatile approaches to synthesize either …

[HTML][HTML] The importance of ions in low pressure PECVD plasmas

A Michelmore, JD Whittle, RD Short - Frontiers in Physics, 2015 - frontiersin.org
Plasma enhanced chemical vapor deposition (PECVD) can be used to fabricate surfaces
with a wide range of physical and chemical properties and are used in a variety of …

Recent advances in plasma deposition of functional coatings on polymers

L Martinu, MR Wertheimer… - MRS Online …, 1998 - cambridge.org
Plasma enhanced chemical vapor deposition (PECVD) is increasingly being applied for the
fabrication of functional coatings on polymeric substrates. This presentation briefly reviews …

Evaluation of the membrane performance of ultra-smooth silicon organic coatings depending on the process energy density

L Kleines, S Wilski, P Alizadeh, J Rubner, M Wessling… - Thin Solid Films, 2022 - Elsevier
Plasma-enhanced chemical vapor deposition (PECVD) can be used to apply thin layers to
plastics with a wide range of customizable functionality. The selective permeation properties …

Plasma-enhanced chemical vapor deposition of functional coatings

L Martinu, O Zabeida, JE Klemberg-Sapieha - Handbook of deposition …, 2010 - Elsevier
Publisher Summary Functional coating systems can be fabricated by different deposition
techniques. Among the above processes, plasma-enhanced chemical vapour deposition …

Plasma Enhanced‐Chemical Vapor Deposited Polymers: Plasma Phase Reactions, Plasma–Surface Interactions, and Film Properties

M Creatore, A Perrotta - CVD Polymers: Fabrication of Organic …, 2015 - Wiley Online Library
The field of plasma enhanced‐chemical vapour deposition (PE‐CVD) of polymers is
fascinating because it succeeds in polymerizing monomer units also at low pressure (< 1 …