In this paper, we discuss the use of pulse width modulation (PWM) to control analog MEMS
devices. We achieve a precise linear analog control of MEMS by applying PWM signal with …

Microelectromechanical systems (MEMS) provide engineers with a rich palette of technical
solutions to a wide range of actuation and sensing challenges. MEMS devices are low cost …

We develop a new technique for preshaping input commands to control
microelectromechanical systems (MEMS). In general, MEMS are excited using an …

Microelectromechanical systems (MEMS) have a variety of potential civil and military
applications. As MEMS become widely implemented, the application of closed-loop control …

The transient performance of electrostatic actuators is important in high-frequency switching
operation of MEMS devices [1]. Optimization of the transient behavior of a simple actuator …

We propose the use of electrostatic force feedback to control the effective mass, damping, or
stiffness of micro electro mechanical system (MEMS). Our analysis suggests that if feedback …

Micro actuators are critical elements in all micro-systems which require components that are
not stationary. Numerous technologies have been developed in the field of MEMS to provide …

We investigate the nonlinear dynamic behavior of an electrostatic MEMS mirror. The MEMS
mirror is driven by repulsive force actuators, which avoid pull-in instability and enable large …

Micro-Electro-Mechanical Systems (MEMS) combine lithographically formed mechanical
structures with electrical elements to create physical systems that operate on the scale of …

From a controls point of view, micro electromechanical systems (MEMS) can be driven in an
open-loop and closed-loop fashion. Commonly, these devices are driven open-loop by …