Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

C Yugma, J Blue, S Dauzère-Pérès, A Obeid - Journal of Scheduling, 2015 - Springer
Scheduling in semiconductor manufacturing is of vital importance due to the impact on
production performance indicators such as equipment utilization, cycle time, and delivery …

Integration of process planning and scheduling—a review

W Tan, B Khoshnevis - Journal of Intelligent Manufacturing, 2000 - Springer
In recent years, a few researchers have addressed the need for the integration of process
planning and scheduling functions in order to achieve superior overall system performance …

Production activity control: a practical approach to scheduling

J Duggan, J Browne - International journal of flexible manufacturing …, 1991 - Springer
There is a widely perceived gap within the domain of scheduling for manufacturing systems,
namely, many of the methods employed by production supervisors are quite different from …

Operations management in automated semiconductor manufacturing with integrated targeting, near real-time scheduling, and dispatching

N Govind, EW Bullock, L He, B Iyer… - IEEE Transactions …, 2008 - ieeexplore.ieee.org
To help address the need for manufacturing cycle time reduction, Intel has adopted an
integrated operations management approach that consists of three key components …

Impact of production control and system factors in semiconductor wafer fabrication

C Qi, AI Sivakumar, SB Gershwin - IEEE Transactions on …, 2008 - ieeexplore.ieee.org
This paper validates a proposed job release methodology and experimentally investigates
the impact of production control methodologies and system factors on wafer fab performance …

A survey of dispatching rules for operational control in wafer fabrication

A Varadarajan, SC Sarin - IFAC Proceedings Volumes, 2006 - Elsevier
Production scheduling in semiconductor wafer fabs is a nontrivial task owing to the
complexity of wafer fabrication. Dispatching rules are the most commonly used tools for shop …

[图书][B] Production planning and control for semiconductor wafer fabrication facilities: modeling, analysis, and systems

L Mönch, JW Fowler, SJ Mason - 2012 - books.google.com
Over the last fifty-plus years, the increased complexity and speed of integrated circuits have
radically changed our world. Today, semiconductor manufacturing is perhaps the most …

A survey of dispatching rules for operational control in wafer fabrication

SC Sarin, A Varadarajan, L Wang - Production Planning and …, 2011 - Taylor & Francis
Production scheduling in semiconductor wafer fabs is a non-trivial task owing to the
complexity of wafer fabrication. Dispatching rules are the most commonly used tools for shop …

Make-to-order scheduling in foundry semiconductor fabrication

KH Kang, YH Lee - International journal of production research, 2007 - Taylor & Francis
On-time delivery is one of the performance measurements in the make-to-order
semiconductor industry. Many control policies, such as input dispatching rules, CONWIP and …

Scheduling setup changes at bottleneck workstations in semiconductor manufacturing

Z Duwayri, M Mollaghasemi, D Nazzal… - Production Planning & …, 2006 - Taylor & Francis
This paper presents a scheduling heuristic to aid the operators in semiconductor fabrication
facilities (commonly referred to as fabs) in choosing what type of lots to process next and …