Nowadays, wafer fabrication in semiconductor manufacturing is highly dependent on cluster
tools. A cluster tool is equipped with several process modules (PMs) and a wafer handling …

Because of residency time constraints and activity time variation of cluster tools, it is very
difficult to operate such integrated semiconductor manufacturing equipment. This paper …

A robotic cluster tool involves many activities whose time is subject to some disturbance,
thus leading to the activity time variation. It results in wafer sojourn time fluctuation in a …

As the design of integrated circuits has become increasingly complicated and dense,
serious wafer quality problems are observed in modern wafer fabrication facilities …

Integrated circuit chips are produced on silicon wafers. Robotic cluster tools are widely used
since they provide a reconfigurable and efficient environment for most wafer fabrication …

Robotized cluster tools for semiconductor manufacturing have strict time constraints such
that a wafer processed at a processing chamber should be unloaded within a specified time …

Multi-cluster tools are highly productive yet expensive wafer fabricating facility in
semiconductor industry. Current competitive business trend requires high-mix and low …

Optimal cyclic scheduling problems of wafer-residency-time-constrained dual-arm cluster
tools in wafer fabrication are challenging and remain to be fully solved. Existing studies …

In wafer fabrication, a robotic cluster tool is required to be closed down in order for
engineers to perform its on-demand and preventive maintenance and switch between …

For some wafer fabrication processes in cluster tools, eg, atomic layer deposition (ALD),
wafer revisiting is required. Typically, in such processes, wafers need to visit two …