Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures

B Zope, K Shrestha, S Swaminathan, C Zhu… - US Patent …, 2022 - Google Patents
2020-11-07 Assigned to ASM IP HOLDING BV reassignment ASM IP HOLDING BV
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被引用次数：349 相关文章 所有 4 个版本

Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures

B Zope, K Shrestha, S Swaminathan, C Zhu… - US Patent …, 2023 - Google Patents
2021-02-01 Assigned to ASM IP HOLDING BV reassignment ASM IP HOLDING BV
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors …
被引用次数：222 相关文章 所有 4 个版本

Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a …

EC Stevens, B Zope, S Swaminathan… - US Patent …, 2022 - Google Patents
2020-10-01 Assigned to ASM IP HOLDING BV reassignment ASM IP HOLDING BV
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被引用次数：228 相关文章 所有 4 个版本

Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material

K Väyrynen, T Hatanpää, M Ritala… - US Patent 11,499,222, 2022 - Google Patents
2020-12-28 Assigned to ASM IP HOLDING BV reassignment ASM IP HOLDING BV
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被引用次数：196 相关文章 所有 4 个版本
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Methods for depositing a molybdenum metal film on a dielectric surface of a substrate and related semiconductor device structures

B Zope, S Swaminathan, K Shrestha, C Zhu… - US Patent App. 16 …, 2019 - Google Patents
US20190067003A1 - Methods for depositing a molybdenum metal film on a dielectric
surface of a substrate and related semiconductor device structures - Google Patents …
被引用次数：344 相关文章 所有 2 个版本

Lid for epitaxial growing device

Y Mori, A Okabe - US Patent App. 29/449,598, 2013 - Google Patents
US11286558B2 (en) 2019-08-23 2022-03-29 Asm Ip Holding BV Methods for depositing a
molybdenum nitride film on a surface of a substrate by a cyclical deposition process and …
被引用次数：203 相关文章 所有 2 个版本
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Electrostatic chuck for semiconductor manufacturing equipment

Y Sasaki, T Takahashi - US Patent App. 29/553,360, 2017 - Google Patents
US11286558B2 (en) 2019-08-23 2022-03-29 Asm Ip Holding BV Methods for depositing a
molybdenum nitride film on a surface of a substrate by a cyclical deposition process and …
被引用次数：195 相关文章 所有 2 个版本

Engine cap

S Kneip - US Patent App. 29/615,829, 2019 - Google Patents
USD849055S1 - Engine cap - Google Patents USD849055S1 - Engine cap - Google Patents
Engine cap Download PDF Info Publication number USD849055S1 USD849055S1 …
被引用次数：227 相关文章 所有 2 个版本

Suction cover

S Geldenhuys, MJ Buitendag - US Patent App. 29/596,270, 2019 - Google Patents
USD846008S1 - Suction cover - Google Patents USD846008S1 - Suction cover - Google
Patents Suction cover Download PDF Info Publication number USD846008S1 USD846008S1 …
被引用次数：206 相关文章 所有 2 个版本

Grease cover

BR Bever, AW Jessee - US Patent App. 29/617,352, 2018 - Google Patents
USD825614S1 - Grease cover - Google Patents USD825614S1 - Grease cover - Google
Patents Grease cover Download PDF Info Publication number USD825614S1 USD825614S1 …
被引用次数：226 相关文章 所有 2 个版本