[PDF][PDF] The effect of annealing temperature on properties of PZT ceramic films prepared via spin-coating process

M Khieokae, K Jinpak, S Kritwattanakorn… - Kasem Bundit …, 2023 - kbu.ac.th
In this work, lead zirconate titanate Pb (Zr0. 52Ti0. 48) O3 or PZT films under 20% mol of
Pbexcess were fabricated on Ti/SiO2/Si wafer by spin-coating method. The PZT films were …

Effect of Annealing on the Properties of Spin Coated Lead Zirconium Titanate Thinfilms

NS Subramanian, K Kathiresan - Advanced Materials Research, 2012 - Trans Tech Publ
Lead zirconium titanate thinfilms have been prepared by the cost effective spin coating
method on glass and stainless steel substrate with the following optimized coating …

Effect of sol temperature on structural, morphological and magnetic properties of PZT thin films on alumina substrate

K Sreelalitha, K Thyagarajan - Materials Research Express, 2016 - iopscience.iop.org
In the present study, we investigate the structural, morphological and magnetic properties of
sol–gel spin-coated PZT thin films on alumina substrate. The morphotropic phase boundary …

A study on the microstructure of preferred orientation of lead zirconate titanate (PZT) thin films

CJ Kim, DS Yoon, JS Lee, CG Choi… - Journal of materials …, 1997 - cambridge.org
The lead zirconate titanate (PZT) thin films were fabricated using sol-gel spin coating onto
Pt/Ti/glass substrates. Effects of the holding time for pyrolysis and the coating cycle on the …

The effect of annealing on improving the quality of lead zirconate titanate thin films on Pt/SiO2/Si substrates

CC Chang, PC Lu - Journal of Materials Processing Technology, 1999 - Elsevier
This paper discusses the impact of different annealing conditions on the structures of PZT
thin films. At a RF power of 100W, a substrate of 350° C and an Ar flow rate of 20sccm …

Characterization of lead zirconate titanate thin film deposition onto Pt/Ti/SiO2/Si substrates

CC Chang, KH Chen - Journal of materials science: materials in …, 1999 - Springer
Abstract Lead zirconate titanate,(Pb (Zr 0.52 Ti 0.48) O 3 PZT) thin films were deposited onto
a Pt/Ti/SiO 2/Si substrate using radio frequency (rf) planar magnetron sputtering in this study …

Investigation of physical properties of perovskite PZT thin films as a function of sol temperature

K Sreelalitha, K Thyagarajan - Journal of Materials Science: Materials in …, 2016 - Springer
Abstract PZT [Pb (Zr 0.52 Ti 0.48) O 3] thin films were prepared on quartz substrate by sol gel
spin coating technique. The Zr/Ti ratio was kept at 52/48 which is morphotropic phase …

Lead–zirconate–titanate thin films deposited on silicon using a novel technique at low temperature

J Zeng, M Zhang, Z Song, L Wang, J Li, K Li… - Applied surface science, 1999 - Elsevier
Lead–zirconate–titanate (Pb (Zr0. 52Ti0. 48) O3, PZT) thin films have been successfully
prepared on silicon substrates using a novel technique, which involved a combination of …

Effects of Annealing Temperature on Crystal Structure and Microstructure of PZT Thin Films (52/48) Prepared by RF Magnetron Sputtering

P Thongrit, M Horprathum, K Pengpat… - Integrated …, 2021 - Taylor & Francis
In this research, the effects of annealing temperatures on the crystallization and morphology
of Pb (Zr0. 52Ti0. 48) O3 (PZT) thin films on (111) Pt/Ti/SiO2/(100) Si and (111) Au/Cr/(100) …

Effect of Pb Excess Content on Microstructure and Electrical Properties of Sol Gel Derived PZT Thin Films

Z Wang, R Maeda, K Kikuchi - MRS Online Proceedings Library (OPL …, 1999 - cambridge.org
Lead zirconate titanate (PZT) thin films were fabricated by a three-step heat-treatment
process which involves the addition of-10, 0 and 10 mol% excess Pb to the starting solution …